O3-Annealing Effect on the Etching Resilience of a TiO2/Al2O3 filter Prepared by Atomic Layer Deposition
Por:
Vazquez J.L., López J., Bohórquez C., Lizarraga E., Blanco E., Can-Uc B., Romo O., Nedev N., Farías M.H., Tiznado H.
Publicada:
1 ene 2023
Resumen:
This research investigates the improvements of ozone (O3) annealing on the optical and etching characteristics of TiO2/Al2O3 multilayer band-pass filters designed for potential optoelectronic applications. The band-pass filters were fabricated using atomic layer deposition (ALD), and their performance was systematically analyzed after the addition of O3 annealing at moderate temperatures (up to 300 °C). Results reveal that O3 annealing improves the optical transmittance of the multilayers by approximately 40% without significant spectral changes (~6 nm). The observed enhancement in the transmittance is attributed to the improved stoichiometry of TiO2. By filling in the oxygen vacancies created during the fabrication process, it reduces its extinction coefficient. Furthermore, the O3 annealing enhances the stability of TiO2 against wet etching, improving the uniformity of etched surfaces. Etching on the ozone-annealed multilayer was up to 8 times more homogeneous, as observed in the roughness. The relatively short duration of the O3 annealing process, approximately 1.6 h, makes it a cost-effective alternative compared to using ozone in the ALD process, which can last several hours for thick optical coatings. © 2023 American Chemical Society.
Filiaciones:
Vazquez J.L.:
Centro de Investigación Científica y de Educación Superior de Ensenada-CICESE, Ensenada, 22860, Mexico
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
López J.:
CONAHCYT - Centro de Nanociencias y Nanotecnología, UNAM, Km 107 Carretera Tijuana-Ensenada s/n., Ensenada, 04510, Mexico
Bohórquez C.:
Centro de Investigación Científica y de Educación Superior de Ensenada-CICESE, Ensenada, 22860, Mexico
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
Lizarraga E.:
Universidad Autónoma de Baja California, Unidad Valle de las Palmas, Blvd. Universitario 1000, Baja California, Tijuana, 22260, Mexico
Blanco E.:
Departamento de Física de la Materia Condensada, Universidad de Cádiz, Puerto Real, E11519, Spain
Can-Uc B.:
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
Romo O.:
Centro de Investigación Científica y de Educación Superior de Ensenada-CICESE, Ensenada, 22860, Mexico
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
Nedev N.:
Universidad Autónoma de Baja California, Instituto de Ingeniería, Blvd. Benito Juárez s/n, Baja California, Mexicali, 21280, Mexico
Farías M.H.:
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
Tiznado H.:
Universidad Nacional Autónoma de México (UNAM), Centro de Nanociencias y Nanotecnología (CNyN), Km 107 Carretera Tijuana-Ensenada s/n, Baja California, Ensenada, 04510, Mexico
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