Growth and characterisation of polymeric amorphous carbon and carbon nitride films from propane
Por:
Fanchini G., Mandracci P., Tagliaferro A., Rodil S.E., Vomiero A., Della Mea G.
Publicada:
1 ene 2005
Resumen:
In this work, we report about the deposition of a-C(N):H films by electron-cyclotron-resonance using propane as a carbon precursor. The films generally present high H contents (up to 61 at.%) and large optical gaps. The maximum N content we obtained is 13 at.%. In nitrogenated films, we observed a strong decrease of the stretching intensity of the infrared spectra of the hydrocarbon (CHn) vibrations, even at very low nitrogen content, the H content being still comparable to that of pure a-C:H. The various phenomena that can lead to such an effect are discussed: (i) different type of hydrogen bonding (CHn and NHn) in presence and in absence of nitrogenation; (ii) weakening of the cross-section of the CHn groups in presence of nitrogen; (iii) large presence of non-bonded hydrogen meaning, with this, either the presence of molecular H2 or unbounded hydrogen. In addition, the residual amount of IR absorption due to C-H vibrations shows that, in a-CN:H, C-H bonded and non-bonded hydrogen does coexist. © 2005 Elsevier B.V. All rights reserved.
Filiaciones:
Fanchini G.:
Dipartimento Di Fisica, Politecnico Di Torino, Corso Duca degli Abruzzi 24, I-10129 Torino, Italy
Mandracci P.:
Dipartimento Di Fisica, Politecnico Di Torino, Corso Duca degli Abruzzi 24, I-10129 Torino, Italy
Tagliaferro A.:
Dipartimento Di Fisica, Politecnico Di Torino, Corso Duca degli Abruzzi 24, I-10129 Torino, Italy
Rodil S.E.:
Instituto De Investigaciones En Materiales, UNAM, Coyoacan, México D. F, Mexico
Vomiero A.:
Laboratori Nazionali Di Legnaro, Istituto Nazionale Di Fisica Nucleare, Padova, Italy
Dipartimento Di Fisica, Università Di Padova, Padova, Italy
Della Mea G.:
Laboratori Nazionali Di Legnaro, Istituto Nazionale Di Fisica Nucleare, Padova, Italy
Dipartimento Di Ingegneria, Università Di Trento, Trento, Italy
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