Laser-induced phase changes of metallic Ti and W thin films


Por: Evans R., Camacho-López S., Rangel-Rojo R., Camacho-López M., Pérez C.S., Camacho-López M.A., Esparza-García A.

Publicada: 1 ene 2004
Resumen:
In this work we present experimental findings in the field of laser matter interaction on the topic of laser induced oxidation and crystalline structure change. It has been shown in the past few years1.2 that lasers can be used to induce both oxidization of metals as well changes the crystal in the crystalline structure of the metal oxide. Conventional theory has proven to be mildly successful in predicting these effects with a thermal model; drawing its influence from the traditional method of inducing material change by baking the metal. We reformed a scan of varying values of laser intensity and accumulated fluence. We will show evidence of an increase in the oxygen content in Ti and W thin films irradiated by a frequency doubled Nd:YAG laser source with a pulse duration of 4ns and per pulse energies of 26 to 60?J (peak intensities of 1.7×107 to 3.8 × 107W/cm2.) We will also show that other effects, that may include crystalline structure change, are also occurring.

Filiaciones:
Evans R.:
 Ctro. Invest. Cientfica/Educ. S.E., Km. 107 Carretera, Tijuana-Ensenada BC 22860, Mexico

Camacho-López S.:
 Ctro. Invest. Cientfica/Educ. S.E., Km. 107 Carretera, Tijuana-Ensenada BC 22860, Mexico

Rangel-Rojo R.:
 Ctro. Invest. Cientfica/Educ. S.E., Km. 107 Carretera, Tijuana-Ensenada BC 22860, Mexico

Camacho-López M.:
 Ctro. Cie. Apl. y Desarrollo Tecn., Univ. Auton. Metropolitana I., Apdo. Postal 55-534, México D.F. 90000, Mexico

Pérez C.S.:
 Ctro. Cie. Apl. y Desarrollo Tecn., Univ. Auton. Metropolitana I., Apdo. Postal 55-534, México D.F. 90000, Mexico

Camacho-López M.A.:
 Ctro. Cie. Apl. y Desarrollo Tecn., Univ. Auton. Metropolitana I., Apdo. Postal 55-534, México D.F. 90000, Mexico

Esparza-García A.:
 Ctro. Cie. Apl. y Desarrollo Tecn., Univ. Auton. Metropolitana I., Apdo. Postal 55-534, México D.F. 90000, Mexico
ISSN: 0277786X
Editorial
SPIE-INT SOC OPTICAL ENGINEERING, 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA, Estados Unidos America
Tipo de documento: Conference Paper
Volumen: 5622 Número: PART
Páginas: 1544-1549
WOS Id: 000225617300288

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