Bonding characteristics of DC magnetron sputtered B-C-N thin films investigated by Fourier-transformed infrared spectroscopy and X-ray photoelectron spectroscopy
Por:
Linss V., Rodil S.E., Reinke P., Garnier M.G., Oelhafen P., Kreissig U., Richter F.
Publicada:
1 ene 2004
Resumen:
B-C-N thin films of a wide composition range were deposited by reactive DC magnetron sputtering of targets with different B/C ratios in an Ar/N2 atmosphere. The bonding characteristics of these amorphous films were investigated by Fourier-transformed infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The results of both characterisation methods indicate that real ternary compounds in which all three elements are bonded to each other are only formed when at least one element has a low concentration in the film - and therefore could be considered as an impurity. Otherwise the deposited material tends to a phase separation into binary compounds and single phases. © 2004 Elsevier B.V. All rights reserved.
Filiaciones:
TU Chemnitz, Institut für Physik, Physik Fester Koerper, 09107 Chemnitz, Germany
Inst. de Invest. en Materiales, UNAM, CU, Circuito Exterior s/n, Coyoacan, México D. F., Mexico
Dept. of Mat. Sci. and Engineering, University of Virginia, 116 Engineers Way, Charlottesville, VA 22904-4145, United States
Departement für Physik, Klingelbergstr. 82, CH-4056 Basel, Switzerland
Forschungzentrum Rossendorf, Postfach 510119, 01314 Dresden, Germany
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