Production and characterisation of carbon nitride thin films produced by a graphite hollow cathode system
Por:
Muhl S., Gaona-Couto A., Méndez J.M., Rodil S., Gonzalez G., Merkulov A., Asomoza R.
Publicada:
1 ene 1997
Resumen:
Carbon nitride thin films have been prepared by plasma enhanced chemical vapour deposition of CH4 and N2 gas mixtures, by chemical transport from a hollow graphite cathode. The deposits prepared on pieces of single crystal silicon substrates were characterised using FTIR, Raman, SEM, EDX, SIMS, X-ray and electron diffraction. Single, double and triple carbon nitrogen bonds were detected in the FTIR spectra; the relative intensities of the associated bands being a function of the plasma power and substrate bias. Elemental analysis of the deposit showed that the nitrogen content was ?57 at%. A polycrystalline deposit identified as hexagonal ?-C3N4 was obtained at low substrate temperatures. The deposit was found to grow preferentially on scratch defects on the silicon substrate surface and was stable upon annealing under vacuum up to 700°C. © 1997 Elsevier Science S.A.
Filiaciones:
Muhl S.:
Inst. de Invest. en Materiales, Univ. Nac. Autonoma de México, Apartado Postal 70-360, Coyoacan, México, D.F. 04510, Mexico
Gaona-Couto A.:
Inst. de Invest. en Materiales, Univ. Nac. Autonoma de México, Apartado Postal 70-360, Coyoacan, México, D.F. 04510, Mexico
Méndez J.M.:
Inst. de Invest. en Materiales, Univ. Nac. Autonoma de México, Apartado Postal 70-360, Coyoacan, México, D.F. 04510, Mexico
Rodil S.:
Inst. de Invest. en Materiales, Univ. Nac. Autonoma de México, Apartado Postal 70-360, Coyoacan, México, D.F. 04510, Mexico
Gonzalez G.:
Inst. de Invest. en Materiales, Univ. Nac. Autonoma de México, Apartado Postal 70-360, Coyoacan, México, D.F. 04510, Mexico
Merkulov A.:
Ctro. de Invest. y Estud. Avanzados, Inst. Politécnico Nacional, Apartado Postal 14-470, México D.F. 07000, Mexico
Asomoza R.:
Ctro. de Invest. y Estud. Avanzados, Inst. Politécnico Nacional, Apartado Postal 14-470, México D.F. 07000, Mexico
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