High rate deposition of ta-C:H using an electron cyclotron wave resonance plasma source
Por:
Morrison N.A., Rodil S.E., Ferrari A.C., Robertson J., Milne W.I.
Publicada:
1 ene 1999
Resumen:
A compact electron cyclotron wave resonance (ECWR) source has been developed for the high rate deposition of hydrogenated tetrahedral amorphous carbon (ta-C:H). The ECWR provides growth rates of up to 1.5 nm/s over a 4-inch diameter and an independent control of the deposition rate and ion energy. The ta-C:H was deposited using acetylene as the source gas and was characterized as having an sp3 content of up to 77%, plasmon energy of 27 eV, refractive index of 2.45, hydrogen content of about 30%, optical gap of up to 2.1 eV and RMS surface roughness of 0.04 nm. © 1999 Elsevier Science S.A. All rights reserved.
Filiaciones:
Morrison N.A.:
Engineering Department, University of Cambridge, Cambridge CB2 1PZ, United Kingdom
Rodil S.E.:
Engineering Department, University of Cambridge, Cambridge CB2 1PZ, United Kingdom
Ferrari A.C.:
Engineering Department, University of Cambridge, Cambridge CB2 1PZ, United Kingdom
Robertson J.:
Engineering Department, University of Cambridge, Cambridge CB2 1PZ, United Kingdom
Milne W.I.:
Engineering Department, University of Cambridge, Cambridge CB2 1PZ, United Kingdom
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