Influence of the ion energy on the structure of Bi and Fe2O3 thin films
Por:
Cardona D., Camps E., Escobar-Alarcón L., Rodil S.E.
Publicada:
1 mar 2013
Resumen:
Compounds containing bismuth, iron and oxygen (BFO) can result in
materials with important magnetic and electrical properties for
high-technology applications. We plan to prepare such compounds using
the simultaneous ablation of bismuth and iron oxide targets. For that
reason in the first part of this work we study the plasmas and the
materials produced by ablation of bismuth or Fe2O3 targets, and then the
two plasmas are combined in order to deposit the BFO compounds. The
individual plasmas were characterized using a Langmuir probe, in order
to measure the mean kinetic ion energy (E (p)) and plasma density (N
(p)). Bismuth and magnetite-Fe3O4 thin films were obtained in high
vacuum (2.7x10(-4) Pa). Meanwhile for the deposition of alpha-Fe2O3
(hematite) or amorphous bismuth oxide thin films a reactive atmosphere
(Ar/O-2=80/20) was used. All depositions were made at room temperature.
The bismuth thin films crystallized in the rhombohedral metallic system
with preferential orientations that depended on the Bi-ion energy used.
Bismuth oxide phases were only obtained after annealing of the Bi thin
films at different temperatures. Iron oxide thin films reproducing the
target stoichiometry were obtained at a certain value of iron-ion
energy. Preliminary structural results of the BFO thin films obtained by
the combination of the individual plasmas are presented.
Filiaciones:
Cardona D.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
Camps E.:
Departamento de Física, ININ, Apdo. Postal 18-1027, México DF 11801, Mexico
Escobar-Alarcón L.:
Departamento de Física, ININ, Apdo. Postal 18-1027, México DF 11801, Mexico
Rodil S.E.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
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