Plasma-induced size reduction in gold nanoclusters embedded in a dielectric matrix
Por:
Fandino, J, Crespo A., Santana G., Rodríguez-Fernández L., Alonso J.C., García-Sánchez M.F., Ortiz A., Vigil O., Lopez-Suarez A., Oliver A.
Publicada:
1 dic 2009
Resumen:
Sandwich structures of silicon-nitride/gold/silicon-nitride with approximate thickness of 40 nm were fabricated by means of inductively-coupled remote plasma enhanced chemical vapor deposition and sputtering. In an intermediate step, nanostructure gold was subject to different surface plasma treatments, varying the plasma treatment time as well as the plasma atmosphere. The resulting structures were studied by high resolution transmission electron microscopy and Rutherford backscattering. As a consequence of plasma treatments, the gold nanoparticles mean size decreases, the particle areal distributions become narrower and the particle shapes evolve from island-like to near spherical symmetry. Oxygen plasma-etch of gold nanoparticles was observed. © 2009 American Scientific Publishers.
Filiaciones:
Crespo A.:
Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 04510, DF, Mexico
Santana G.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
Rodríguez-Fernández L.:
Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 04510, DF, Mexico
Alonso J.C.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
García-Sánchez M.F.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
Ortiz A.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
Vigil O.:
Escuela Superior de Física y Matemáticas, IPN, Edif. 9, U.P.A.L.M., D.F., 07738, Mexico
Lopez-Suarez A.:
Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 04510, DF, Mexico
Oliver A.:
Univ Nacl Autonoma Mexico, Inst Fis, Mexico City 04510, DF, Mexico
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