Effect of Si addition on the structure and corrosion behavior of NbN thin films deposited by unbalanced magnetron sputtering
Por:
Velasco L., Olaya J.J., Rodil S.E.
Publicada:
1 feb 2016
Resumen:
In this work, nanostructured NbxSiyNz thin films were deposited onto
stainless steel AISI 304 substrates by co-sputtering a Nb target with Si
additions while using unbalanced magnetron sputtering. The
microstructure was analyzed by X-ray diffraction, and the chemical
composition was identified by X-ray photoelectron spectroscopy. The
hardness was measured by nanoindentation, and the corrosion resistance
was studied by potentiodynamic polarization curves and electrochemical
impedance spectroscopy using a 3 wt% NaCl solution. The addition of Si
in the NbN thin films changed the microstructure from a crystalline to
an amorphous phase. The chemical analysis showed the presence of both
Si3N4 and NbN phases. The hardness decreased from 20 GPa (NbN) to 15 GPa
for the film with the highest Si concentration (28.6 at.%).
Nevertheless, the corrosion properties were significantly improved as
the Si concentration increased; the polarization resistance after 168 h
of immersion was two orders of magnitude larger in comparison with the
substrate.
Filiaciones:
Velasco L.:
Univ Nacl Colombia, Fac Ingn, Dept Ingn Mecan & Mecatron, Bogota 14490, Colombia
Univ So Calif, Dept Chem Engn & Mat Sci, Los Angeles, CA 90089 USA
Departamento de Ingeniería Mecánica y Mecatrónica, Universidad Nacional de Colombia, Bogotá, AA 14490, Colombia
Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089, United States
Olaya J.J.:
Univ Nacl Colombia, Fac Ingn, Dept Ingn Mecan & Mecatron, Bogota 14490, Colombia
Departamento de Ingeniería Mecánica y Mecatrónica, Universidad Nacional de Colombia, Bogotá, AA 14490, Colombia
Rodil S.E.:
Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
Instituto de Investigaciones en Materiales, Universidad Nacional Autónoma de México, Mexico, D. F. 04510, Mexico
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