Deposit of AlN thin films by nitrogen reactive pulsed laser ablation using an Al target


Por: Chale-Lara, F., Zapata-Torres, M., Caballero-Briones, F., De la Cruz, W., Cruz Gonzalez, N., Huerta-Escamilla, C., Farias, M. H.

Publicada: 1 jul 2019
Resumen:
We report the synthesis of AlN hexagonal thin films by pulsed laser ablation, using Al target in nitrogen ambient over natively-oxidized Si (111) at 600 degrees C. Composition and chemical state were determined by X-ray photoelectron spectroscopy, while structural properties were investigated using X-ray diffraction. High-resolution XPS spectra present a gradual shift to higher binding energies on the Al-2p peak when nitrogen pressure is incremented, indicating the formation of the AlN compound. At 30 mTorr nitrogen pressure, the Al-2p peak corresponds to AlN, located at 73.1 eV, and the XRD pattern shows a hexagonal phase of AlN. The successful formation of the AlN compound is corroborated by UV-Vis reflectivity measurements.

Filiaciones:
Chale-Lara, F.:
 Inst Politecn Nacl, CICATA Altamira, Lab Mat Fotovolta, Km 14-5 Carr Tampico Pto Ind Altamira, Altamira 89600, Tamaulipas, Mexico

Zapata-Torres, M.:
 Inst Politecn Nacl, CICATA, Unidad Legaria, Legaria 694 Col Irrigac, Ciudad De Mexico 11500, Mexico

Caballero-Briones, F.:
 Inst Politecn Nacl, CICATA Altamira, Lab Mat Fotovolta, Km 14-5 Carr Tampico Pto Ind Altamira, Altamira 89600, Tamaulipas, Mexico

De la Cruz, W.:
 Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Km 107 Carretera Tijuana Ensenada, Ensenada 22860, Baja California, Mexico

Cruz Gonzalez, N.:
 Inst Politecn Nacl, CONACyT, CICATA, Unidad Legaria, Legaria 694 Col Irrigac, Ciudad De Mexico 11500, Mexico

Huerta-Escamilla, C.:
 Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Km 107 Carretera Tijuana Ensenada, Ensenada 22860, Baja California, Mexico

Farias, M. H.:
 Univ Nacl Autonoma Mexico, Ctr Nanociencias & Nanotecnol, Km 107 Carretera Tijuana Ensenada, Ensenada 22860, Baja California, Mexico
ISSN: 0035001X
Editorial
SOC MEXICANA FISICA, APARTADO POSTAL 70-348, COYOACAN 04511, MEXICO, México
Tipo de documento: Article
Volumen: 65 Número: 4
Páginas: 345-350
WOS Id: 000473327400005
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