Indium-doped ZnO nanorods grown on Si (111) using a hybrid ALD-solvothermal method
Por:
Cervantes-Lopez, J. L., Rangel, R., Garcia-Mendez, M., Tiznado, H., Contreras, O., Quintana, P., Bartolo-Perez, P., Alvarado-Gil, J. J.
Publicada:
1 jul 2017
Resumen:
Atomic layer deposition (ALD) followed by microwave hydrothermal
processing was successfully employed for producing doped and vertically
aligned ZnO nanorod arrays with different aspect ratio. Firstly, a
textured ZnO layer with preferential orientation normal to the c-axis
was formed on substrate (111) silicon single crystals by means of the
ALD technique. This was achieved through the decomposition of
diethylzinc at 190 degrees C and 3.289 x 10(-4) atm, which provided an
adequate template with nucleation sites, favoring further growth of
vertical nanorods. Subsequently, nanorod array growth was produced on
the same surfaces through solvothermal synthesis using as promoter a
solution of Zn(NO3)(2). In addition, growth of indium-doped ZnoO
nanorods over the substrates was produced by using In(CH3COO)(3) as a
doping agent. The method presented allows good quality ZnO and Zn1-xInxO
thin films to be obtained. Photoluminiscence spectra show clear evidence
of the inclusion of indium in the ZnO matrix. The higher intensity ratio
Zn0.96In0.4O/ZnO was increased 40-fold, demonstrating such an effect.
Filiaciones:
Cervantes-Lopez, J. L.:
Univ Michoacana, Fac Ingn Quim, Programa Doctorado Ciencias Ingn Quim, SNH, Morelia 58030, Mich, Mexico
Univ Michoacana SNH, Fac Ingn Quim, Programa Doctorado Ciencias Ingn Quim, Morelia 58030, Mich, Mexico
Rangel, R.:
Univ Michoacana, Fac Ingn Quim, Div Estudios Posgrad, SNH, Morelia 58030, Mich, Mexico
Univ Michoacana SNH, Fac Ingn Quim, Div Estudios Posgrad, Morelia 58030, Mich, Mexico
Garcia-Mendez, M.:
Univ Autonoma Nuevo Leon, Fac Ciencias Fis Matemat, San Nicolas De Los Garza, Nuevo Leon, Mexico
Univ Autonoma Nuevo Leon, Fac Ciencias Fis Matemat, San Nicolas De Los Garza, NL, Mexico
Tiznado, H.:
UNAM, CNyN, Ensenada, Baja California, Mexico
UNAM, CNYN, Ensenada Baja California, Nuevo Leon, Mexico
Contreras, O.:
UNAM, CNyN, Ensenada, Baja California, Mexico
UNAM, CNYN, Ensenada Baja California, Nuevo Leon, Mexico
Quintana, P.:
CINVESTAV, IPN, Dept Fis Aplicada, Unidad Merida, Merida, Yucatan, Mexico
CINVESTAV IPN, Unidad Merida, Dept Fis Aplicada, Merida, Yucatan, Mexico
Bartolo-Perez, P.:
CINVESTAV, IPN, Dept Fis Aplicada, Unidad Merida, Merida, Yucatan, Mexico
CINVESTAV IPN, Unidad Merida, Dept Fis Aplicada, Merida, Yucatan, Mexico
Alvarado-Gil, J. J.:
CINVESTAV, IPN, Dept Fis Aplicada, Unidad Merida, Merida, Yucatan, Mexico
CINVESTAV IPN, Unidad Merida, Dept Fis Aplicada, Merida, Yucatan, Mexico
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