TRACK PROFILE DETERMINATION BY DIRECT DIGITAL PROCESSING OF SEM IMAGES.
Por:
Peralta-Fabi Ri., Balcazar-Garcia M., Lira J., Hernandez G., Perez-Peraza J.
Publicada:
1 ene 1983
Resumen:
This technique utilizes Y-modulated SEM images, as opposed to the usual intensity-modulated, in order to enhance geometrical details. With a proper calibration, it is possible to determine diameter, shape, and depth of tracks in plastic detectors. Measurements are effectuated by a specifically developed computer program that obtains its data from pre-stored digitized images. Scaling is achieved relating discrete picture elements to the magnification indicators common to some SEM images. Working examples from various tracks produced by different kinds of ions, as well as a detailed description of the method, are presented.